| Sunday, 25 January | ||
| 13:00 - 17:00 | Industry Session | |
| 17:00 - 19:00 | Conference Registration and Check-In | |
| 17:00 - 19:00 | Welcome Reception | |
| Monday, 26 January | ||
| 08:00 - 08:30 | Welcome Address | |
| 08:30 - 08:50 | • IEEE Fellows Recognition in the Field of
MEMS/NEMS • IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award |
|
| 08:50 - 09:35 | Plenary Presentation I | |
| 09:35 - 10:35 | Session I | |
| 10:35 - 11:15 | Break and Exhibit Inspection | |
| 11:15 - 12:30 | Session II | |
| 12:30 - 13:55 | Lunch and Exhibit Inspection | |
| 13:55 - 14:55 | Session III | |
| 14:55 - 16:55 | Poster Session I | |
| 16:25 - 16:55 | Break and Exhibit Inspection | |
| 16:55 - 17:00 | MEMS Community Announcement | |
| 17:00 - 18:15 | Session IV | |
| 18:15 | Adjourn for the Day | |
| Tuesday, 27 January | ||
| 08:30 - 09:15 | Plenary Presentation II | |
| 09:15 - 10:15 | Session V | |
| 10:15 - 10:55 | Break and Exhibit Inspection | |
| 10:55 - 12:10 | Session VI | |
| 12:10 - 13:40 | Lunch and Exhibit Inspection | |
| 13:40 - 14:55 | Session VII | |
| 14:55 - 16:55 | Poster Session II | |
| 16:25 - 16:55 | Break and Exhibit Inspection | |
| 16:55 - 18:10 | Session VIII | |
| 18:10 | Adjourn for the Day | |
| Wednesday, 28 January | ||
| 08:30 - 09:15 | Plenary Presentation III | |
| 09:15 - 10:00 | Session IX | |
| 10:00 - 10:30 | Break and Exhibit Inspection | |
| 10:30 - 11:45 | Session Xa | Session Xb |
| 11:45 - 13:00 | Lunch and Exhibit Inspection | |
| 13:00 - 14:00 | Session Xia | Session Xib |
| 14:00 - 14:10 | Transition | |
| 14:10 - 15:25 | Session XIIa | Session XIIb |
| 15:25 - 17:25 | Poster Session III | |
| 16:15 - 16:45 | Break and Exhibit Inspection | |
| 16:45 | Adjourn for the Day | |
| 19:00 - 22:00 | Conference Banquet | |
| Thursday, 29 January | ||
| 08:30 - 09:15 | Plenary Presentation IV | |
| 09:15 - 10:15 | Session XIII | |
| 10:15 - 10:55 | Break and Exhibit Inspection | |
| 10:55 - 11:55 | Session XIV | |
| 11:55 - 12:15 | Awards Ceremony and Final Remarks | |
| 12:15 | Conference Adjourns | |